In this paper, we identify the Young’s modulus and residual stress state of a free-standing thin aluminum membrane, used in MEMS radio-frequency (rf) switches. We have developed a new methodology that combines a membrane deflection experiment (MDE) and three-dimensional numerical simulations. Wafer-level MDE tests were conducted with a commercially available nanoindenter. The accuracy and usefu...

WE DERIVE FIELD EQUATIONS for a functionally graded plate whose deformations are governed by either the first-order shear deformation theory or the third-order sheardeformation theory. These equations are further simplified for a simply supported polygonal plate. An exact relationship is established between the deflection of the functionally graded plate and that of an equivalent homogeneous Ki...

Nanocantilevers have become key components of nanomechanical sensors that exploit changes in their resonant frequencies or static deflection in response to the environment. It is necessary that they can operate at a given, but adjustable, resonant frequency and/or static deflection ranges. Here we propose a new class of nanocantilevers with a significantly tunable spectrum of the resonant frequ...