This paper addresses the challenges related to the design of a high-resolution, low-latency capacitive displacement sensor. An auto-alignment mechanism of the sensor head is proposed which relaxes the resolution requirement of the readout circuit. Different interfacing principles are investigated and analyzed, and the advantage of using a switched-capacitor readout topology for a specific appli...

Capacitive sensing buttons are emerging as a popular interface alternative to mechanical switches in many consumer electronics and white goods applications. However, designing a capacitive sensing interface comes with its own challenges that introduce new product development, production, and quality control concerns. For example, the parasitic capacitance (CP) of capacitive sensing buttons can ...

A highly sensitive NEMS capacitive sensor with electrode separation in the order of Debye length is fabricated for label free DNA analysis. The use of nano-scale electrode separation provides better insight in to the target-probe interaction which was not previously attainable with macro or even micro scale devices. As the double layers from both the capacitive electrodes merge together and occ...

This paper presents a comparative study of pressure-sensitive sensor materials being suitable for monitoring purposes in pressure mapping sensor networks. Four sensor materials working on piezoresistive, piezoelectric, quasi-piezoelectric and capacitive principle have been discussed including the built-up, the working principle, the manufacturing and the most important properties. Additionally,...

This paper reports a novel, low-cost, moderately sensitive, meso-scale accelerometer fabricated with spring steel foil and equipped with either a Hall Effect-based proximity sensor or a capacitive sensor. Since the sensitivity of a Hall Effect sensor is low, we attach a displacement-amplifying compliant mechanism (DaCM) to the proof-mass of the accelerometer to increase the overall sensitivity ...

A ceramic thick film humidity sensor was produced from an emulsion of titania powders by a spin coating technique using a low speed. Electrical measurements were taken between interdigital electrodes obtained by depositing silver paste on the oxide, then cured at 500 ◦C for 15 min. Different relative humidities of a dynamic atmosphere were obtained by mixing dry and 23 ◦C saturated synthetic ai...

In this paper we present a framework for the design of experiments for sensor calibration. The theoretical ideas, which are based on the mathematical theory of optimal design of experiments, are demonstrated using a new software program, I-OPT, which was developed by Crary, Snow, and Hoo.' This program has been used to find I-optimal designs for both a silicon capacitive absolute-pressure senso...

A healable transparent capacitive touch screen sensor has been fabricated based on a healable silver nanowire-polymer composite electrode. The composite electrode features a layer of silver nanowire percolation network embedded into the surface layer of a polymer substrate comprising an ultrathin soldering polymer layer to confine the nanowires to the surface of a healable Diels-Alder cycloaddi...

Flexible and high-sensitive capacitive sensors are demanded to detect pressure distribution and/or tactile information on a curved surface, hence, wide varieties of polymer-based flexible MEMS sensors have been developed. High-sensitivity may be achieved by increasing the capacitance of the sensor using solid dielectric material while it deteriorates the flexibility. Using air as the dielectric...