In this work, we model a radiofrequency discharge of hydrogenated silicon nitride in a capacitive coupled plasma reactor using Maxwellian and non-Maxwellian electron energy distribution function. The purpose is to investigate whether there is a real advantage and a significant contribution using non-Maxwellian electron energy distribution function rather than Maxwellian one for determining the ...

Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacita...

In this paper, electromagnetic modeling of capacitors and inductors for printed electronic circuits is studied. Capacitors are successfully modeled by two-dimensional finite element software. Capacitive sensor for chemical detection is proposed and tested in water. Inductors are modeled by the integrating through the currents and obtained results have been compared with 3D finite element method...

In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the...

A delay and power model of a CMOS inverter driving a resistive-capacitive load is presented. The model is derived from Sakurai’s alpha power law and exhibits good accuracy. The model can be used to design and analyze those inverters that drive a large RC load when considering both speed and power. Expressions are provided for estimating the propagation delay, transition time, and short circuit ...

In this paper we investigate a short range capacitive proximity sensor as complementary sensor system in situations, where conventional optical based sensor systems have short comings, e.g., due to space requirements. In the presented collision avoidance scenario it can be used even without any vision or Lidar based sensor system. Our sensor is capable of detecting humans and objects made of co...

Capacitive proximity sensors can be used to implement a variety of expressive input devices. They are especially suitable for Whole Body Interaction as they are small, robust, flexible, and can be both worn on the body or embedded into the environment. This chapter discusses technical challenges that arise when using capacitive sensors for tracking human motion, namely sensor shielding and ensu...

In this paper, multi-channel capacitive sensor arrays based on microstrip band-stop filters are studied. The sensor arrays can be used to detect the proximity of objects at different positions and directions. Each capacitive sensing structure in the array is connected to an inductive element to form resonance at different frequencies. The resonances are designed to be isolated in the frequency ...

A novel capacitive tactile sensor using a polyurethane thin film is proposed in this paper. In previous studies, capacitive tactile sensors generally had an air gap between two electrodes in order to enhance the sensitivity. In this study, there is only polyurethane thin film and no air gap between the electrodes. The sensitivity of this sensor is higher than the previous capacitive tactile sen...

 We propose a circuit to directly connect a differential capacitive sensor to a microcontroller unit (MCU), which is based on the charge-transfer method and does not need any calibration component. The performance has been tested by emulating the differential capacitive sensor with discrete components. The major uncertainty sources are residual stray capacitances. The maximal deviation obtaine...