This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...

We report the main parameters of a nine-electrode bimorph piezoelectric adaptive mirror designed to correct low-order aberrations. We describe measurements of the control coefficients for defocus, astigmatism, pure coma, and spherical aberration of this mirror and the temperature stability of its profile. The performance of a simple adaptive optical system for imaging through laboratory-generat...

This paper reports a self powered smart sensor node (also called ‘smart tag’) consisting of a piezoelectric vibration energy harvester, a power conditioning circuit, sensors and an RF transmitter. The smart tag has dimensions similar to a credit card and can be easily integrated into various applications such as the ibration energy harvesting iezoelectric generator elf-powered ireless sensor no...

We present a micromachined, stress-induced, thermal bimorph actuator for optical purpose. Piston motions of more than 3um are demonstrated by FEM simulation. Upon the release from the substrate, the actuators lift off the substrate due to a large built-in bending moment arising from the compressive residual stress in the poly-silicon layer and tensile residual stress in the metal layer. Large d...

A 3-PRR flexure based mechanism which is used as a redundant mechanism providing only x-y micro positioning is designed and controlled in this paper. The aim of this work is to eliminate the unpredictable motions due to manufacturing and assembling errors by implementing sliding mode control (SMC) with disturbance observer (DOB) using piezoelectric actuator models. The system is designed to be ...

This paper features the modelling and design of a type of multirate output feedback based controller (Fast Output Sampling Feedback FOS) to control the flexural vibrations of a smart flexible Timoshenko cantilever beam for a Single Input Single Output (SISO) case by retaining the first 2 dominant vibratory modes. Piezoelectric patches are bonded as sensor / actuator to the master structure at d...