This paper presents an effective design methodology and flow, which is validated through three mmwave/sub-mm-wave amplifiers: including W-band LNA with NF=7dB, W-band PA with PAE >11% and D-band amplifier with gain>20dB. The CMOS based amplifiers can be integrated with III-V materials to form heterogeneous integration, such as COSMOS, to achieve the best performance for various applications.