We have recently been able to grow single-walled carbon nanotubes by purely thermal chemical vapour deposition (CVD) at temperatures as low as 400 degrees C. This has been achieved by separating the catalyst pre-treatment step from the growth step. In the pre-treatment step, a thin film catalyst is re-arranged into a series of nano-droplets, which are then the active catalysts. Both steps have ...

Ozone/TEOS thermal chemical vapor deposition ~CVD! has been investigated for SiO2 deposition on Si, using a cold-wall research reactor equipped to determine the effects of precursor concentration, deposition temperature ~300–500 °C!, and pressure ~30–200 Torr! on deposition rates, etch rates, and step coverage in the regime of subatmospheric CVD ~SACVD!. Deposition rates first increase with sub...

A series of emission current measurements were taken from various types of multiwalled carbon nanotube (MWCNT) films in order to examine their stability for electron field emission. We found that the MWCNTs films grown by the catalytic thermal chemical vapor deposition (CVD) method exhibited much improved emission stability as compared to MWCNT films grown by the plasma-enhanced CVD (PECVD) met...

We review our recent results on the growth and characterization of silicon nanowires (SiNWs). Vapourphase deposition techniques are considered, including chemical vapour deposition (CVD), plasma-enhanced chemical vapour deposition (PECVD), high-temperature annealing, and thermal evaporation. We present complementary approaches to SiNW production. We investigate the low-temperature (down to 300 ...

A model of a tungsten chemical vapor deposition (CVD) system is developed to study the CVD system thermal dynamics and wafer temperature nonuniformities during a processing cycle. We develop a model for heat transfer in the system’s wafer/susceptor/guard ring assembly and discretize the modeling equation with a multiple-grid, nonlinear collocation technique. This weighted residual method is bas...

Synthetic diamond films can be prepared on a waferscale by using chemical vapour deposition (CVD) on suitable substrates such as silicon or silicon dioxide. While such films find a wealth of applications in thermal management, in X-ray and terahertz window design, and in gyrotron tubes and microwave transmission lines, their use for nanoscale optical components remains largely unexplored. Here ...

Several methods have been reported in the literature for the synthesis of silicon nanowires (SiNW) [1,2]. Among these, the most widely used has been chemical vapor deposition (CVD) [3, 4]. Gold has been generally used in this process because the Au-Si system has a low eutectic temperature and with a silicon–rich eutectic composition. As a consequence, the synthesis process can take place at tem...

Stationary phases that provide high resolutions and are stable at high temperatures are of significant importance in chromatographic analysis. Carbon nanotubes (CNTs) are known to have high thermal and mechanical stability and have the potential to be high-performance separation media that utilize the nanoscale interactions. Here, we report the first application of self-assembled CNTs in long c...

0266-3538/$ see front matter 2009 Elsevier Ltd. A doi:10.1016/j.compscitech.2008.12.021 * Corresponding author. Tel.: +1 979 845 9409; fax E-mail address: [email protected] (D.C The interfacial shear strength of carbon nanotube coated carbon fibers in epoxy was studied using the single-fiber composite fragmentation test. The carbon fibers were coated with carbon nanotubes (CNT) on the ...

Hydrocarbon precursor such as methane has been widely used to grow graphene films and the methods of growing quality graphene films are dominated by thermal CVD (chemical vapor deposition) system. Graphene films grown by plasma process are generally highly defective which in turns degrade the quality of the films. Here, using a green precursor, camphor we demonstrate a simple and economical met...