The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitra...

A common measure for near-field acoustic energy of a vibrating structure is the acoustic intensity, which usually has positive and negative values that correspond to energy sources and sinks on the surface of the radiating structure. Sound from source and sink areas partially cancel each other and only a fraction of the near-field acoustic energy reaches the far-field. In this paper, an alterna...

Arrays with polymer-coated acoustic sensors, such as surface acoustic wave (SAW) and surface transverse wave (STW) sensors, have successfully been applied for a variety of gas sensing applications. However, the stability of the sensors' polymer coatings over a longer period of use has hardly been investigated. We used an array of eight STW resonator sensors coated with different polymers. This ...

A cylindrical acoustic resonator was externally driven at the first resonance frequency by a compression driver. The acoustic energy stored in the resonator and the power dissipated per unit time were evaluated through the simultaneous measurements of acoustic pressure and velocity, in order to determine the Q value of the resonator. The resulting Q value, being employed as a measure of the dam...

In this research, we investigated the influence of the surface coatings of silver nanowires on the sensitivity of surface acoustic wave (SAW) humidity sensors. Silver nanowires, with poly(vinylpyrrolidone) (PVP), which is a hydrophilic capping agent, were chemically synthesized, with an average length of 15 µm and an average diameter of 60 nm. Humidity sensors, with 433 MHz frequency dual-port ...

The acoustic characteristics of a hybrid silencer consisting of two dissipative chambers and a Helmholtz resonator are investigated first computationally and experimentally. Complex wave number and characteristic impedance are used for the dissipative chambers to account for the wave propagation through absorbing material. Three-dimensional boundary element method (BEM) is employed to predict t...

Based on measurements of nonlinear second-sound resonances in a high-quality resonator, we have observed a steady-state wave energy cascade in He II involving a flux of energy through the spectral range towards high frequencies. We show that the energy balance in the wave system is nonlocal in K space and that the frequency scales of energy pumping and dissipation are widely separated. The wave...