Zero-level packaging technology ensures dicing and handling compatibility of the MEMS device along with low cost by encapsulating the MEMS components using wafer level processing. It is also essential for providing the MEMS with a controlled ambient in a cost-effective way. In order to be compatible with a broad range of MEMS processes, IMEC developed sealing methods with a low temperature budg...

Organic transistor technology holds great promise for creating a conformal, human-safe electronic neural interface. These interfaces must amplify the low, microvolt-range brain signals so they can be utilized in analog and digital applications. Brain signals from sensors must be relayed to the transistor’s gate through the dielectric and semiconductor layers, as well as through an encapsulant w...

-Heat and mass transfer at the nanosecond time scale and the nanometer length scale in pulsed laser fabrication of ultra-shallow p+-junctions is studied in this work. A new technique is developed to fabricate the ultra-shallow p÷-junctions with pulsed laser doping of crystalline silicon with a solid spin-onglass (SOG) dopant, through the nanosecond pulsed laser heating, melting, and boron mass ...

This study presents the fabrication and characterization of a micromechanical tunable in-plane resonator. The resonator is manufactured using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The resonator is made of aluminum, and the sacrificial layer is silicon dioxide. The post-process involves only one maskless etching step using an etchant to remove the sacrifi...

We propose a concept for the design and fabrication of metal nanowires having periodically hollow nanostructures inside the pores of an anodic aluminum oxide (AAO) membrane using a sacrificial metal. In this study, nickel (Ni) and silver (Ag) were used as the base metal and the sacrificial metal, respectively. Alternating an applied potential between -0.4 and -1.0 V provided alternatively depos...

We have studied the effect of phospholipase C from Bacillus cereus and Clostridium perfringens (alpha-toxin) on giant stearoyl-oleoyl phosphatidylcholine (SOPC) vesicles. Enzyme activity leads to a binary mixture of SOPC and the diacylglycerol SOG, which phase separates into a SOPC-rich bilayer phase and a SOG-rich isotropic bulk-like domain embedded within the membrane, as seen directly by pha...

The Symbolic Observation Graph (SOG) associated with a labelled transition system and a subset of its labels is an efficient BDDbased abstraction representing the behavior of a system. The goal of this paper is to compose SOGs such that the resulting SOG is still small but represents the behavior of the composed business process in an appropriate way. In particular, we would like to deduce the ...