A very compact (device area around 40 μm²) optical ammonia sensor based on amicroring resonator is presented in this work. Silicon-on-insulator technology is used insensor design and a dye doped polymer is adopted as sensing material. The sensor exhibitsa very good linearity and a minimum detectable refractive index shift of sensing materialas low as 8x10-5, with a detection limit around 4 ‰.

The recent development of ultrasound sensing using the silicon-photonics platform has enabled super-resolution optoacoustic imaging not possible by piezoelectric technology or polymeric optical microresonators. silicon waveguide etalon detector (SWED) design exploits sub-micrometer light confinement in cross-section a strip to achieve sensor aperture which is 13-fold 30-fold smaller than cutoff...

Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With the advantages of SOI rib waveguide and the silicon microfabrication technology, an array of the...

The silicon-based pressure sensor is one of the major applications in the MEMS device. Nowadays, the silicon piezoresistive pressure sensor is amature technology in the industry, but its requirement in terms of sensing accuracy and stability is more rigorous than that of many advanced applications. The major factor affecting the sensing stability of thepiezoresistivepressure sensor is its therm...

In this paper, a 2-D velocityand direction-selective visual motion sensor with a bipolar junction transistor (BJT)based silicon retina and temporal zero-crossing detector is proposed and implemented. In the proposed sensor, a token-based delay-and-correlate computational algorithm is adopted to detect the selected speed and direction of moving object images. Moreover, binary pulsed signals are ...

The traditional handmade catalytic combustion gas sensor has some problems such as a pairing difficulty, poor consistency, high power consumption, and not being interchangeable. To address these issues, integrated double catalytic combustion of alcohol gas sensor was designed and manufactured using silicon micro-electro-mechanical systems (MEMS) technology. The temperature field of the sensor i...

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms were fabricated via an ultrasonic vibration mill-grinding (UVMG) method, which resulted in a smal...

Silicon sensors are the go-to technology for high-precision in particle physics. But only recently low-noise silicon with internal amplification became available. The so-called Low Gain Avalanche Detector (LGAD) have been developed applications High Energy Physics, but lack two characteristics needed measurement of low-energy protons (<60keV): a thin entrance window (in order tens nm) and effic...

Quick and simple methods to detect the type of life threatening microbial species are very essenti al in food and water contaminated with bacteria. Recently, by utili zi ng the semiconducting polymeric thin films prepared on si licon macroporous substrates a new technology for detection of micro-organisms has been developed. The advantages of the polymeric devices are the ease of fabrication , ...