نتایج جستجو برای: residual stress measurement
تعداد نتایج: 943809 فیلتر نتایج به سال:
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In this paper we propose a new class of sensitive and compact passive stress measurement pattern that uses the piezoresistivity of polysilicon. The proposed measurement pattern utilizes the resistance change of the beam that connects the structures moving in opposite directions. The unit structure is composed of a pair of bent beam actuators with apexes at their mid-points connected by a link b...
A set of test structures for in situ stress measurement is presented. The test structures were realized by means of surface micromachining, adopting photoresist as sacrificial layer and electroplated gold as structural layer. Initially array of buckling type test structures cantilevers, fixedfixed beams, guckel rings and diamond were used to find out critical buckling beam. Later on rotational ...
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