An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fab...

Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by ...

In this paper, the influencing parameters of a novel purely mechanical wireless in-mould injection moulding sensor were investigated. The sensor is capable of detecting the melt front at predefined locations inside the mould. The sensor comprises a movable pin which acts as the sensor element generating structure-borne sound triggered by the passing melt front. Due to the sensor design, melt pr...

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stag...

This work presents a single-chip sub-mm3 wireless pressure sensor suitable for tire pressure monitoring. The dynamic behavior and safety of an automobile tire is closely dependent on its inflation pressure: maintaining the manufacturerrecommended pressure is essential to prevent tire failure, provide stability, improve fuel efficiency and tire-life, and to reduce CO2 emissions [1]. Thus, Tire-P...

The development of a new passive wireless pressure sensor, based on an electromagnetic transduction approach, is reported. The sensing element is a flexible high resistivity silicon membrane located above a coplanar quarter-wavelength resonator. The comprehensive coverage of the physical bases is beyond the scope of this paper. For the remote extraction of the applied pressure value, the passiv...

Pressure induced microbends have been created in a 50 μm graded index multimode optical fibre with spatial periodicity Λ = 4.5 mm, embedded in the sample of araldite. If high pressure is applied directly to optical fibre having microbends, it may break, and if pressure is applied to embedded fibre in a solid structure without microbends, the sensitivity is lower. In this paper, a combination of...

As the core component of the sense of touch, flexible pressure sensors are critical to synchronized interactions with the surrounding environment. Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate and a dielectric layer of polystyrene (PS) micr...

This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit, which consists of an encapsulated pressure-sensitive chip, a temperature compensation circuit and a signal-conditioning circuit. A silicon on insulation (SOI) material and a standard MEMS process are used in the pressure-sensitive chip fabrication...

This paper introduces an optical measurement system for shock wave characteristics. The system works by mountinga metal plate attached to spring mounts against the shock wavefront. This set is sealed and can plot the shock wave pressure diagram by measuring plate's displacement, radiation and changing the reflection of light during shock wave conflict, and converting these optical data to volta...