In this paper, a fine particle manipulation system using a piezoresistive microcantilever, which is normally utilized in Atomic Force Microscopy, as the manipulator and force sensor, and a top-view Optical Microscope (OM) as the vision sensor is proposed. Modeling and control of the interaction forces among the manipulator, particle and surface have been realized for moving particles with sizes...

A simulation program is developed which is capable of calculating the output responses of piezoresistive pressure sensors as a function of pressure and temperature. Analytical models based on small and large deflection theories have been applied to predict the sensitivity and linearity of pressure sensors. Surfacemicromachined diaphragms with square or circular shapes, fabricated by a low press...

ABSTRACT We have newly developed a label-free protein sensor based on MEMS Fabry-Perot interferometer integrated with a photodiode, which utilizes nonlinear optical effect of the Fabry-Perot resonance to enhance the sensitivity of surface stress. A parylene was used for a deformable membrane of the protein sensor because of the high optical transmittance and low Young’s modulus. Theoretical sig...

The paper focuses on the design of a CMOS analog ASIC for temperature-drift compensation of a high sensitivity piezoresistive micro-machined porous silicon pressure sensor to avoid analog-to-digital conversion, limit chip area and reduce power consumption. For implementing the compensation circuitry, multilayered perceptron (MLP) based artificial neural network (ANN) with inverse delayed functi...

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In this paper, a novel piezoresistive accelerometer based on the piezoresistive effect of GaAs/Al0.4Ga0.6As thin films was designed. The piezoresistive accelerometer contains four suspended flexural beams and a central proof mass configuration. The piezoresistive effect of a piezoresistor or thin film was used to make a resistor changing the output that is proportional to applied acceleration. ...