The carrier profile for InAs films grown on GaP is modeled as a first-order approximation which assumes that 90° edge dislocation intersections and the threading dislocation intersections act as shallow donors. Due to dislocation annihilation during growth, the threading dislocation intersection density decreases as the inverse of the distance x from the InAs/GaP interface, D(x)5D0x0 /(x0 1x), ...