A resonance based micro pressure sensor is designed and simulated an analytical overview of its working presented. The resonator used electrostatically actuated clamped-clamped (cc) beam supported over docks. correlation between stress in micro-resonator width docs the support structure evaluated. It compared to a without it found that with provides better sensitivity. Performance device evalua...

We describe the design of Fourier type array generators and beam shapers as periodic configurations refractive-diffractive optical elements in microscale to provide specific shaping imaging functionaliies. investigate how addition micro-nanostructures regular microstructure arrays enables new degrees freedom for micro-optical systems, combination with adapted fabrication techniques yields a bet...

Microfabrication is actually a collection of technologies which are utilized in making microdevices. Some of them have very old origins, not connected to manufacturing, like lithography or etching. Electroplating is technique adapted to produce micrometre scale structures, as are various stamping and embossing techniques. Micro-Components are required in a range of new products such as medical ...

Germanium micro-strip sensors were selected as the sensor technology to take data in energy dispersive X-ray spectroscopy experiments at Extremely Brilliant Source (EBS) Grenoble (FR). It is important for this experimental technique use with a large uniform area and fine pitch. The former determines range of detectable single sensor. latter improves spectral resolution. A high stopping power al...

The rapid growth of the micro-electro-mechanical systems (MEMS) is being driven by the rapid development of the micro manufacturing processes. Laser beam machining is one of the micro manufacturing processes which can shape almost all ranges of engineering materials. In this study, the effect of laser power on the quality of drilled micro holes using Cu50Zr50 amorphous alloys foils is experimen...

Multi-reflection Bragg coherent diffraction imaging has the potential to allow three-dimensional (3D) resolved measurements of the full lattice strain tensor in specific micro-crystals. Until now such measurements were hampered by the need for laborious, time-intensive alignment procedures. Here a different approach is demonstrated, using micro-beam Laue X-ray diffraction to first determine the...