 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

The ability to integrate micro-optical elements with movable structures and microactuators has opened up many new opportunities for optical and optoelectronic systems"2. It allows us to manipulate optical beams more effectively than conventional methods, and is scalable to large optical systems. Optical MEMS (MicroElectroMechanical Systems) have applications in di~play~"'~, sensing6, and optica...

MEMS-PIC is the ability to make different optical components using the Same fabrication process. Typical optical components for free-space oplical systems include (I) optical elcmenh, such as lenses, mirrors, refractive and diffractive optical elements, (2) three-dimensional optomechmical support, such mimr mount, and (3) movable s1Tuctures and actuators such as XYZ micropositionem. In the past...

This paper signifies a very basic design and simulation techniques of RF MEMS switches using the advanced design systems software tool (ADS).Micro electro mechanical systems are recent development technologies which has better characteristics performance and also operating at microwave range of frequencies. Fundamentally MEMS switches can be categorized into two types series switches (ohmic typ...

In this paper, a frequency reconfigurable active array antenna (RAA) system, which can be reconfigurable at three different frequency bands, is proposed. The proposed RAA system is designed with a novel frequency reconfigurable front-end amplifiers (RFA) with the simple reconfigurable impedance matching circuits (RMC) with the MEMS switches. With the MEMS switch, the RFA is realized without any...

The ability to integrate micro-optical elements with movable structures and microactuators has opened up many new opportunities for optical and optoelectronic systemsI2. It allows us to manipulate optical beams more effectively than conventional methods, and is scalable to large optical systems. Optical MEMS (MicroElectroMechanical Systems) have applications in display, sensing, and optical dat...

We report on a 32 × silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The is fabricated 200-mm silicon-on-insulator wafers in commercial complementary metal-oxide-semiconductor (CMOS) foundry. device has maximum on-chip loss of 7.7 dB and an extinction ratio 50.8 dB. switching voltage 9.45 V the 20-dB bandwidth 28.7 nm. Our work shows promi...