previous studies of sputter-induced topographical development have shown that it is possible to form pyramids on single-crystal fee metals oriented in the (1131) crystallographic direction. These pyramids form when the surface is bombarded with relatively large ( > 1 X 10” cmm2) doses of Ar+, Kr+ or Xe+ ions in the energy range 20-41 keV. Until recently most of the work was confined to pure fee...

The effect of energetic Xenon ion bombardment on the extreme ultraviolet (EUV) reflectivity performance of mirrors is of vital importance for the performance of dischargeand laserproduced plasma extreme ultraviolet lithography (EUVL) sources. To study these effects, we measured absolute and relative reflectivities at the National Institute of Standards and Technology and the Interaction of Mate...

The absolute sputtering yields of D+, He+ and Li+ on deuterium saturated solid lithium have been measured and modelled at 45◦ incidence in the energy range 100–1000 eV. The Ion–surface InterAction Experiment (IIAX) was used to measure the absolute sputtering yield of lithium in the solid phase from bombardment with a Colutron ion source. The lithium sample was treated with a deuterium plasma fr...

The ion bombardment-induced release of particles from a metal surface is investigated using energetic fullerene cluster ions as projectiles. The total sputter yield as well as partial yields of neutral and charged monomers and clusters leaving the surface are measured and compared with corresponding data obtained with atomic projectile ions of similar impact kinetic energy. It is found that all...

An experimental study on the energy spectra of ions emitted from surface a polycrystalline Cu target under bombardment by 2 keV O + molecular was carried out. Sputtered atomic and were prevailed among positively charged secondary ions, negative in addition to sputtered - , CuO intense elastically inelastically backscattered revealed. Keywords: spectra, ion sputtering, charge exchange.

Time-of-flight secondary ion mass spectrometry (TOF-SIMS) analyzes chemical information by measuring ions generated via bombardment of an energetic ion beam on the surface of a specimen. Negative hydrocarbon ion species of C2nH are ubiquitous in TOF-SIMS for any hydrocarbon-containing materials, but their utilities are perhaps not fully explored. Using polyethylene, polypropylene, polyisoprene,...

Nanopatterning of solid surfaces by low-energy ion bombardment has received considerable interest in recent years. This interest was partially motivated by promising applications of nanopatterned substrates in the production of functional surfaces. Especially nanoscale ripple patterns on Si surfaces have attracted attention both from a fundamental and an application related point of view. This ...