The first three-axis micro-force sensor with adjustable force range from ±20 μN to ±200 μN and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed...

The design and adaptation of a haptic data glove based on the Tekscan grip sensor 4255N is introduced in this paper with detailed discussion on sensor selection, implementation, and calibration issues. The gloves are used in experiments to measure human to human haptic interaction. Data analysis methods and initial results are illustrated. Evaluation results show that the pressure sensor based ...

We present a novel tactile sensor, which is useful for dextrous grasping with a simple robot gripper. The novel part consists of an array of capacitive sensors, which couple to the object by means of little brushes of fibers. These sensor elements are very sensitive (with a threshold of about 5 mN) but robust enough not to be damaged during grasping. They yield two types of dynamical tactile in...

We present a micrograting-based force sensor integrated with a surface micromachined silicon-nitride probe for penetration and injection into Drosophila embryos. The probe is supported by springs of a known spring constant, and the penetration force is determined from displacement measurements using a high-resolution, miniaturized optical encoder that is designed to only be sensitive to axial d...

Skeletal muscle is the largest tissue structure in our body and plays an essential role for producing motion through integrated action with bones, tendons, ligaments and joints, for stabilizing body position, for generation of heat through cell respiration and for blood glucose disposal. A key function of skeletal muscle is force generation. Non-invasive and selective measurement of muscle cont...