The electro-optical properties of lead zirconate titanate (PZT) thin films depend strongly on the quality and crystallographic orientation of the thin films. We demonstrate a novel method to grow highly textured PZT thin films on silicon using the chemical solution deposition (CSD) process. We report the use of ultrathin (5-15 nm) lanthanide (La, Pr, Nd, Sm) based intermediate layers for obtain...

In this paper, the interdisciplinary energy harvesting issues on piezoelectric energy harvesting were investigated using a ‘33’ mode (mechanical stress and/or electric field are in parallel to the polarization direction) lead zirconate titanate multilayer piezoelectric stack (PZT-Stack). Key energy harvesting characteristics including the generated electrical energy/power in the PZT-Stack, the ...

This paper describes the use of micromachined lead zirconate titanate (PZT) piezoceramic elements for heat generation by ultrasonic energy dissipated within the elements and surrounding media. Simulations based on three-dimensional finite-element models suggest that circular disk-shaped elements provide superior steady-state temperature rise for a given cross-sectional area, volume of the PZT e...

Thick soft and hard lead zirconate titanate (PZT) films are fabricated on alumina substrates using the screen-printing technique. The geometries of the substrates are suited to three different mechanical characterization tests devoted to the determination of the Young’s modulus of the films: a dynamic, a quasi-static and a nanoindentation test. Values of 52 8 and 20 7 GPa for the Young’s modulu...

Wafer-scale arrays of well-ordered Pb(Zr(0.2)Ti(0.8))O3 nanodiscs and nanorings were fabricated on the entire area (10 mm x 10 mm) of the SrRuO3 bottom electrode on an SrTiO3 single-crystal substrate using the laser interference lithography (LIL) process combined with pulsed laser deposition. The shape and size of the nanostructures were controlled by the amount of PZT deposited through the pat...

During dental sinus lift surgery, it is important to monitor the thickness of the remaining maxilla to avoid perforating the sinus membrane. Therefore, a sensor should be integrated into ultrasonic dental tools to prevent undesirable damage. This paper presents a piezoelectric (PZT) sensor installed in an ultrasonic transducer to measure the stiffness of high and low materials. Four design type...

Novel designs of an array of piezoelectric stack actuators using a unique buckling mechanism are presented in this paper. Multiple PZT actuator units with high gain displacement amplification mechanisms are arranged in parallel with spatial phase differences. Having an inherent kinematic singularity, the buckling mechanism provides not only an extremely high gain of displacement amplification, ...

Thickness mode piezoelectric micro-electromechanical system (MEMS) ultrasound transducers, operating in the 50-75 MHz range, have been fabricated using a composite sol gel technique in combination with wet etching. The composite sol gel technique involves producing a PZT powder/sol composite slurry, which when spun down yields films a few micrometers thick. Repeated layering, and infiltration, ...

We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6-inch wafers with thickness variation of less than +/− 5% across the entire wafer. Our PZT film has an unusually high content of Nb dopant (13%) which results in 1.7-fold higher piezoelectric coefficient than sputtered PZT films previously r...