This article presents an inductively loaded radio frequency (RF) microelectromechanical systems (MEMS) reconfigurable filter with spurious suppression implemented using packaged metal-contact switches. Both simulation and measurement results show a two-state, two-pole 5% filter with a tuning range of 17% from 1.06 GHz to 1.23 GHz, an insertion loss of 1.56–2.28 dB and return loss better than 13...

This paper shows the promising results in the integration of low-loss and high isolation RF MEMS switch in OMMIC GaAs MMIC process line. This technology has been used to design building blocs (such as reconfigurable impedance matching network for reconfigurable LNAs) targeting phased arrays applications. This work is part of the FP7 EU-project MEMS-4-MMIC.

Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS r...

In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications. The efforts can be generally divided into two areas: planar reconfigurable transceivers and phased arrays using MEMS devices. For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and f...

Recently, the acceptance of micro electromechanical systems (MEMS) technology is growing in various areas such as medical, optical, automobile and telecommunication. In realizing the needs in MEMS, techniques derived from mechanical engineering plays an essential role in the determination of geometric design variables and process parameters, experiments in fabrication and the elastic and plasti...