This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

A novel process for monolithic integration of RF MEMS switches with three-dimensional (3-D) antenna elements on a microwave laminate printed circuit board (PCB) is presented. This process calls for a low temperature (90-170C) high-density inductively coupled plasma chemical vapor deposition (HDICP CVD) technique that allows the choice of any PCB substrate, such as RO4003-FR4 (εr=3.38, tanδ=0.00...

Some applications of RF MEMS switches, such as aircraft condition monitoring and distributed satellite communication, present a unique challenge for device design and reliability. This article examines these switches when operational temperatures in the range 60°C to 100°C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools for examining device reliability...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

In the last decade Micromechanical components for communication applications has been fabricated via IC-compatible MEMS technologies. In fact, its most important impact is not at the component level, but rather at the system level, by offering alternative transceiver architectures that reduce power consumption and enhance performance. In this paper a mixer-filter for AM frequency receiver with ...

This article presents an inductively loaded radio frequency (RF) microelectromechanical systems (MEMS) reconfigurable filter with spurious suppression implemented using packaged metal-contact switches. Both simulation and measurement results show a two-state, two-pole 5% filter with a tuning range of 17% from 1.06 GHz to 1.23 GHz, an insertion loss of 1.56–2.28 dB and return loss better than 13...

This paper shows the promising results in the integration of low-loss and high isolation RF MEMS switch in OMMIC GaAs MMIC process line. This technology has been used to design building blocs (such as reconfigurable impedance matching network for reconfigurable LNAs) targeting phased arrays applications. This work is part of the FP7 EU-project MEMS-4-MMIC.

Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS r...

In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications. The efforts can be generally divided into two areas: planar reconfigurable transceivers and phased arrays using MEMS devices. For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and f...