MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

MEMS-based storage is one of the leading candidates as tomorrow’s storage medium due to its salient characteristics such as high-parallelism, high density, and low-power consumption. Because physical structures of MEMS-based storage is different from those of hard disks, new software management techniques for MEMS-based storage are needed. Specifically, MEMS-based storage has thousands of paral...

The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional communication components because they consume less DC power, have lower losses, higher linearity and higher Q factor. However, the commercialization of RF MEMS devices is hindered by technological issues such as their...

MEMS-based storage devices are a new technology that is significantly different from both disk drives and semiconductor memories. These differences motivate the question of whether they need new abstractions to be utilized by systems, or if existing abstractions will work well. This paper addresses this question by examining the fundamental reasons that the abstraction works for existing system...

Although Micro-Electro-Mechanical Systems (MEMS) are forming the basis for a rapidly growing industry and fields of research, many MEMS designers still rely on backof-the-envelope calculations due to a lack of efficient computer-aided design (CAD) tools that can assist with the initial stages of design exploration. This paper introduces case-based reasoning (CBR) techniques to the design of MEM...

We theoretically investigate a practically realizable Floquet topological superconductor model based on one-dimensional Rashba nanowire and proximity-induced $s$-wave superconductivity in the presence of Zeeman field. The driven system hosts regular 0-Majorana end modes anomalous $\ensuremath{\pi}$-Majorana (MEMs). By tuning chemical potential frequency drive, we illustrate generation multiple ...

As a result of the unpredictable nature extreme environments (including temperature, humidity, impact, and other factors), micro-electro-mechanical systems (MEMS) solid-state fuze control modules have an urgent requirement for MEMS switch (MEMS-S3). In particular, this must remain stable without any energy input after state transition (i.e., it be bistable). paper, bistable (MEMS-bS3) is design...

MEMS varactors are one of the important passive MEMS devices. Their applications include use in VCOs, tunable impedance matching networks, tunable filters, phase shifters, and true time delay lines. The shunt capacitive structure has been employed in most of the conventional MEMS varactor designs because of its simplicity. However, the capacitance ratio of this conventional shunt capacitive MEM...

ABB Automation is starting to experiment with Microelectrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakhrough products and services that will revolutionize the market in ABB's industrial sensors, instrumentation and analytical areas. The thesis begins with a description of ABB as a...

Zero-level packaging technology ensures dicing and handling compatibility of the MEMS device along with low cost by encapsulating the MEMS components using wafer level processing. It is also essential for providing the MEMS with a controlled ambient in a cost-effective way. In order to be compatible with a broad range of MEMS processes, IMEC developed sealing methods with a low temperature budg...