A mechanical and electrical transistor structure (METS) is proposed for effective voltage scaling. The sub-2 nm nanogap by atomic layer deposition (ALD) without stiction and the application of a dielectric with high-permittivity allowed the pull-in voltage of sub-2 V, showing the strength of the mechanical actuation that is hard to realize in a typical complementary metal-oxide-semiconductor (C...

Micro-stereolithography ( SL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and a...

We present a theoretical investigation of stiction in nanoscale electromechanical contact switches. We develop a mathematical model to describe the deflection of a cantilever beam in response to both electrostatic and van der Waals forces. Particular focus is given to the question of whether adhesive van der Waals forces cause the cantilever to remain in the 'ON' state even when the electrostat...

Wafer-level testing of surface-micromachined sensors provides ncw challenges to the test community. Currently, there is no method available for performing direct measurements to assess faulty micromechanical structures. Most commercial methods use electrical measurements to deduce the physical source of failures in the micromechanical structure. As a result, the process of identifyang various f...

Clean loading of silica nanoparticles with a radius as small [Formula: see text] nm is required for experiments in levitated optomechanics that operate ultra-high vacuum. We present cheap and simple experimental method dry launching by shaking from polytetrafluoroethylene surface (PTFE). report on the successful single minimum 43 nm, which enabled low stiction to surface. Nanoparticles radii 71...

Stiction is a nonlinear friction phenomenon that causes poor performance of control loops in the process industries. In this work, we develop a mixed-integer MPC (Model Predictive Control) formulation including valve dynamics for a sticky valve in order to improve control loop performance. The introduction of the valve nonlinearity into the model prevents the MPC from requesting physically unre...

This paper considers the problem of stiction in electrostatic-elastic deflections whereby elastic surfaces adhere to one another after coming into physical contact under attracting Coulomb interactions. This phenomenon is studied in a family of recently derived models which account for forces which become important when the elastic surfaces are in close proximity. The presence of bistability in...