Sébastien Cueff, Christophe Labbé, Julien Cardin, Khalil Hijazi, Jean-Louis Doualan, et al.. Effects of the thickness on the properties of erbium-doped silicon-rich silicon oxide thin films. physica status solidi (c), Wiley, 2011, E-MRS 2010 Spring Meeting – Symposium I: Advanced Silicon Materials Research for Electronic and Photovoltaic Applications II • E-MRS 2010 Spring Meeting – Symposium J...

Surface properties canmarkedly affect themechanical behavior of structural thin films used inmicroelectromechanical systems (MEMS) applications. This study highlights the striking difference in the sidewall surface morphology of n+-type polysilicon films from two popular MEMS processes and its effect on fracture and fatigue properties. The sidewall surface roughness wasmeasured using atomic for...

In this work, the low-temperature process steps required for the realization of nano-crystal non-volatile memory cells are discussed. An amorphous silicon film, crystallized using a diode pumped solid state green laser irradiating at 532 nm, is proposed as an active layer. The deposition of the subsequent functional layers (e.g., gate oxide) can be done using CVD and ALD reactors in a cluster t...

Photoelectron emission microscopy ~PEEM! has been used to investigate simple device structures buried under ultrathin oxides. In particular, we have imaged Au–SiO2 and p-type Si–SiO2 structures and have demonstrated that PEEM is sensitive to these buried structures. Oxide overlayers ranging up to 15.3 nm were grown by systematically varying the exposure time of the structures to a plasma-enhanc...

Currently, the use of nano silicon in cancer therapy is limited as drug delivery vehicles and markers in imaging, not as manipulative/controlling agents. This is due to limited properties that native states of nano silicon and silicon oxides offers. We introduce nano-functionalized multi-phased silicon/silicon oxide biomaterials synthesized via ultrashort pulsed laser synthesis, with tunable pr...

Silicon is becoming the preferable platform for future integrated components, mostly due to the mature and reliable fabrication capabilities of electronics industry. Nevertheless, even the most advanced fabrication technologies suffer from non-uniformity on wafer scale and on chip scale, causing variations in the critical dimensions of fabricated components. This is an important issue since pho...

Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an exciting new class of nanosensors for rapid electrical detection and characterization of biomolecules. Notable examples include alpha-hemolysin protein nanopores in lipid membranes and solid-state nanopores in Si3N4. Here we report a new technique for fabricating silicon oxide nanopores with single-nanometre prec...

This study investigates the controlled chemical functionalization of silicon oxide nanostructures prepared by AFM-anodization lithography of alkyl-terminated silicon. Different conditions for the growth of covalently bound mono-, multi- or submonolayers of distinctively functional silane molecules on nanostructures have been identified by AFM-height investigations. Routes for the preparation of...

An aqueous ferric nitrate nonahydrate (Fe(NO3)3.9H2O) and magnesium oxide (MgO) were mixed and deposited on silicon nanowires (SiNWs), the carbon nanotubes (CNTs) formed by the concentration of Fe3O4/MgO catalysts with the mole ratio set at 0.15:9.85 and 600°C had diameter between 15.23 to 90nm with high-density distribution of CNT while those with the mole ratio set at 0.45:9.55 and 730°C had ...

This paper investigates the mechanisms of material removal in dynamic friction polishing of polycrystalline diamond composites through the analysis of polishing-produced debris. The specimens used were PCD compacts composed of diamond and silicon carbide. In order to uncover the debris’ structure, high-resolution transmission electron microscopy (HRTEM), electron diffraction and electron energy...