Abstract: Polarization splitter (PBS) consisting of a hybrid plasma horizontal slot waveguide (HSW) and silicon nitride vertical (VSW).At suitable HSW VSW widths, the TE polarization modes in are phase-matched, while TM phase mismatched. The results show that PBS achieves an extinction ratio (ER) 35.1 dB insertion loss (IL) 0.34 for mode at 1.55 μm, For mode, reached 40.9 ER 2.65 IL.