The effect of geometry on thermoelastic damping in micro-beam resonators is evaluated using an eigenvalue formulation and a customized finite element method. The vented clamped–clamped (CC) and clamped-free (CF) beams with square-shaped vents along their centerlines, are both analyzed by the finite element method. The quality factor and the resonant frequency are obtained as functions of variou...

Within recent years, the field of nano-mechanics has diversified in a variety applications, ranging from quantum information processing to biological molecules recognition. Among diversity devices produced these days, simplest (but versatile) element remains doubly-clamped beam: it can store very large tensile stresses (producing high resonance frequencies $f_0$ and quality factors $Q$), is int...

Focused electron beam induced deposition (FEBID) is a direct beam writing technique for nanoand micro-structures. By proper selection of the precursor gas, which is dissociated in the focus of the electron beam, different functionalities of the resulting deposits can be obtained. This contribution discusses nano-granular FEBID materials. Quite generally, nano-granular metals can be considered a...

We investigate the impact of nonlinear damping on the dynamics of a nanomechanical doubly clamped beam. The beam is driven into nonlinear regime and the response is measured by a displacement detector. For data analysis we introduce a nonlinear damping term to Duffing equation. The experiment shows conclusively that accounting for nonlinear damping effects is needed for correct modeling of the ...

We propose and analyze an on-chip all-optical dynamic tuning scheme for coupled nonlinear resonators employing a single control beam injected in parallel with a signal beam. We show that the nonlinear Kerr response can be used to dynamically switch the spectral properties between a "dark state" and electromagnetically induced transparency configurations. Such a scheme can be realized in integra...

A method allowing fabrication of nano-dot markers for electron tomography was developed using an electron beam-induced deposition in an ordinary dual beam instrument (FIB and SEM) or an SEM. The electron beam deposited nano-dot markers are suitable for automatic alignment of tomographic series. The accuracy of the alignment was evaluated and the method was demonstrated on agglomerated nanoparti...

Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. In this paper we report proposals and calculations for novel methods for excitation and readout of cantilever-style NEMS resonators which are applicable over a wide temperature range. We suggest a Lorentz force-based excitation method and discuss an ultrasensitive readout provided by...

We have employed a chip-bending method to exert continuous and reversible control over the tensile stress in doubly clamped nanomechanical beam resonators. Tensile stress is shown to increase the quality factor of both silicon nitride and single-crystal silicon resonators, implying that added tension can be used as a general, material-independent route to increased quality factor. With this dir...