Carbon microand nanostructures has received widespread interest recently due to their potential applications in biomedical devices, chemical sensors, and microelectronics. In this work, we successfully fabricated carbon-micro and nano electromechanical systems (CMEMS/NEMS) by UV/EB lithography and pyrolysis method. Our starting material is a negative photoresist, SU-8. We tried to solve chargin...

Gas sensors are generally defined as devices to detect or measure concentration of (bio-) chemicals in gaseous state. The demands of highly sensitive gas sensors for industry, environmental monitoring, safety, biomedicine, and pharmaceutics have provoked the intensive research interests in micro-electromechanical systems (MEMS) and nanotechnology. The nanotechnology in conjunction with MEMS has...

We study the global solution curves, and prove the existence of infinitely many positive solutions for three classes of self-similar equations, with p-Laplace operator. In case p = 2, these are well-known problems involving the Gelfand equation, the equation modeling electrostatic micro-electromechanical systems (MEMS), and a polynomial nonlinearity. We extend the classical results of D.D. Jose...

A recently developed Finite-Element (FE) model for the precise computation of electrostatic driven MEMS (Micro-ElectroMechanical-Systems) is presented. Thereby, we fully take geometric nonlinearity, contact in the snap-in mode, nonlinear electrostatic coupling forces as well as the moving of charged thin membrane-plate structures (electrodes) in an electric field into account. Furthermore, sinc...

Abstract A comprehensive review is presented on the advances achieved in past years fundamental and applied materials science of diamond films engineering to integrate them into new generations microelectromechanical system (MEMS) nanoelectromechanical systems (NEMS). Specifically, focuses describing performed develop thin film synthesis processes characterization chemical, mechanical, tribolog...

Electromechanical coupling is ubiquitous in biological systems, with examples ranging from simple piezoelectricity in calcified and connective tissues to voltage-gated ion channels, energy storage in mitochondria, and electromechanical activity in cardiac myocytes and outer hair cell stereocilia. Piezoresponse force microscopy (PFM) originally emerged as a technique to study electromechanical p...

Integrated micro sensors, enabled by the advancement in the semiconductor microfabrication technology and MEMS (Micro Electromechanical Systems), have been under dynamic development for the past two decades. While integrated sensors hold great promises, the development of such sensors incurs formidably high cost (millions of dollars) and long development cycles (on the order of years). A fundam...