We demonstrate a silicon micro-opto-electro-mechanical sensor based on mass-loading of a chemo-selective polymer coated onto a microbridge. The sensor is probed optically using an on-chip waveguide Fabry-Pérot interferometer for high resolution displacement and resonant frequency measurement. The mechanical resonator is designed with paddles to simplify chemo-selective polymer deposition and to...

In this paper, we study a nonlocal parabolic problem arising in the study of microelectro mechanical system. The nonlocal nonlinearity involved is related to an integral over the spatial domain. We first give the structure of stationary solutions. Then we derive the convergence of global (in time) solution to the maximal solution as the time tends to infinity. Finally, we provide some quenching...

A surface-acoustic-mode aluminum nitride (AlN) transducer is utilized to determine the type of liquid dropped on the propagation path. It is based on tracking the shrinking droplet radius and observing stagnant liquid molecules during and after the liquid evaporation process. The device configuration is suitable to test small amounts of liquids, in the microliter range. According to both mass l...

Electro-active materials are capable of undergoing large deformation when stimulated by an electric field. They can be divided into electronic and ionic electro-active polymers (EAPs) depending on their actuation mechanism based on their composition. We consider electronic EAPs, for which attractive Coulomb forces or local re-orientation of polar groups cause a bulk deformation. Many of these m...

This paper proposes a general architecture for using evolutionary algorithms to achieve MEMS design synthesis. Functional MEMS devices are designed by combining parameterized basic MEMS building blocks together using Multi-objective Genetic Algorithms (MOGAs) to produce a pareto optimal set of feasible designs. The iterative design synthesis loop is implemented by combining MOGAs with the SUGAR...

Micro-electro-mechanical Systems (MEMS) are components with micron-scale moving parts based on materials and processes of microelectronics fabrication. This is a good example of on-chip integration of electronics, microstructures, microsensors and microactuators. Accurate simulation of MEMS requires precise modeling of all effects of mechanical and damping forces, electrostatic forces and inner...

The last 10 years have seen the emergence of microand nanomechanical force sensors capable of measuring the Casimir interaction with great accuracy and precision. These measurements have proved fundamental to further develop the understanding of vacuum fluctuations in the presence of boundary conditions. These micromechanical sensors have also allowed to quantify the influence of materials prop...

MEMS-PIC is the ability to make different optical components using the Same fabrication process. Typical optical components for free-space oplical systems include (I) optical elcmenh, such as lenses, mirrors, refractive and diffractive optical elements, (2) three-dimensional optomechmical support, such mimr mount, and (3) movable s1Tuctures and actuators such as XYZ micropositionem. In the past...

Chatoyant is an opto-electro-mechanical CAD tool developed to meet the needs of systems designers. In this paper, we present the modeling techniques we have implemented in Chatoyant for system level design of mixed technology micro-systems along with simulation results. ©2000 Optical Society of America OCIS Codes: (200.0200) Optical computing, (060.0060) Fiber optics and optical communications