We summarize two approaches to integrated multiscale process simulation (IMPS), particularly relevant to integrated circuit (IC) fabrication, in which models for equipment (m) and feature (lm) scales are solved simultaneously. The first approach uses regular grids, and is applied to low-pressure chemical vapor deposition (LPCVD) of silicon dioxide from tetraethoxysilane (TEOS). The second appro...

A business process is the set of activities and decision rules required to accomplish an operational objective. Examples include fulfilling an order, manufacturing a product, fielding a technical support phone call, or even launching a rocket. A process model provides an analytical framework for describing the activities and their relationships in detail. It extends the concept of business proc...

In this paper, a reaction system consisting of two parallel, non-isothermal autocatalytic reactions in a Continuous Stirred Tank Reactor (CSTR) has been considered. Reactor chaotic behavior is possible for certain values of system parameters. Two types of controllers are designed and compared in order to control both the reactor temperature and the product concentration. T...

background: the monte carlo method is the most accurate method for simulation of radiation therapy equipment. the linear accelerators are currently the most widely used machines in radiation therapy centers. methods: in this work, a monte carlo modelling of the siemens oncor linear accelerator in 6 mv and 18 mv beams was performed. the results of simulation were validated by measurements in wat...

Simulation of the milling process is a widespread method to improve productivity in the machining process. Several phenomena can be studied and controlled by this mean. All the simulation methods need parameters that characterize the interaction between the tool and the workpiece in order to evaluate the cutting forces. Many models were developed to link efforts to macroscopic parameters (depth...

wide range of planar structures in new technologies has attracted special consideration. in this research vibration behavior of plates with non-linear edges is investigated by means of finite difference (fd) method. for this issue, classical and analytical solutions for plates with linear edges were analyzed and mutual equations, needed for numerical calculation were extracted. by expanding the...

Pulse-echo ultrasound signal formation can be simulated by numerical emulation of the process chain: emit signal – electromechanical emit transformation – wave propagation and scattering – electromechanical receive transformation – receive signal. The simulation software Field II is indented for simulation of linear ultrasound systems. We present an extension to Field II that enables the inclus...

objective: the aim of this study is to evaluate the effect of tissue composition on dose distribution in electron beam radiotherapy. methods : a siemens primus linear accelerator and a phantom were simulated using mcnpx monte carlo code. in a homogeneous cylindrical phantom, six types of soft tissue and three types of tissue-equivalent materials were investigated. the tissues included muscle (s...

one of the great challenges in the processing of materials using equal channel angular pressing (ecap) is the high forming forces required to produce large shear deformation in the material. researchers show that the friction forces between the die and the sample constitute a great part of the total forming forces. recently, ultrasonic vibrations are successfully implemented into the ecap proce...