A kinetic study of chemical vapor deposition of tungsten silicide films was made, focusing on the reactivity and molecular size of film precursors. Tungsten silicide (WSL) fllms were deposited by low pressure CVD from SiH, and WF,. The molecular size of the film precursor was calculated to fit to the diffusion coefficient obtained from the deposition rate profile in a tubular reactor. Typically...

The dissociative sticking coefficient for C2H6 on Pt(111) has been measured as a function of both gas temperature (Tg) and surface temperature (Ts) using effusive molecular beam and angle-integrated ambient gas dosing methods. A microcanonical unimolecular rate theory (MURT) model of the reactive system is used to extract transition state properties from the data as well as to compare our data ...

We have been examining a number of chemically modified mineral fibers, derived from amosite asbestos, by in vitro methods to clarify the role of the fiber surface in determining biological activity. The various fibers have identical size distributions but differ in their affinities for components of the cell membrane. They were treated with boiling toluene or chemically modified by treatment wi...

We study the sticking rate of cold atoms on elastic membrane by exploring the self-energy Σ of the cold atom. We use the Feynman-Dyson perturbation theory to calculate the free atom self-energy to 1-loop. We find non-zero finite sticking rate Γ that agrees with the Golden rule result in ultra-low energy regime. However, with the 1-loop self-energy insertion, we find a suppressed sticking rate Γ...

The sticking coefficient for D(2)O impinging on crystalline D(2)O ice was determined for incident translational energies between 0.3 and 0.7 eV and for H(2)O on crystalline H(2)O ice at 0.3 eV. These experiments were done using directed molecular beams, allowing for precise control of the incident angle and energy. Experiments were also performed to measure the intensity and energy of the scatt...

In friction stir welding (FSW), the real contact conditions between tool and workpiece range of strain rates experienced remain quite unclear. this work, a coupled 3D thermo-mechanical numerical model was used to simulate FSW process. A Parametric finite element analysis evolution conditions, temperatures with processing parameters, dimensions base material plastic properties conducted. The abl...

Cutting sticking operation is essential on a chrysanthemum production to enhance its productivity, since many cuttings can be obtained from one mother plant. Usually, human being manually sticks the cuttings to plug tray, however, it takes a lot of time and much labor, since the number of cuttings is said to be about 200 million in a district where yields the highest number of chrysanthemums in...

This paper focuses on the comparison of calibrated models for teos deposition in a cvd process according to sem images of SiO2 layers. We describe the applied models and the parameters which lead to the best results for each model. The simulations have been performed using our topography simulator elsa (Enhanced Level Set Applications) which follows the surface evolution by solving the level se...