The total energy flux in a high power impulse magnetron sputtering (HiPIMS) plasma has been measured using thermal probes. Radial flux (parallel to the magnetron surface) as well as axial flux (perpendicular to the magnetron surface) were measured at different positions, and resulting energy flux profiles for the region between the magnetron and the substrate are presented. It was found that th...

Reactive sputtering of aluminum oxide in a planar magnetron system is conducted with a mixture of O and Ar reacting with 2 and bombarding an aluminum target. The aluminum target is powered by a pulsed directed current (DC) bias which functions to discharge the accumulated ions on the insulating AlO film surface during the positive duty cycle and suppresses arc formation. x A seven-turn helical ...

INTRODUCTION The Cu polyester thin-sputtered layers on textile fabrics show an acceptable bacterial inactivation kinetics using sputtering methods. MATERIALS AND METHODS Direct current magnetron sputtering (DCMS) for 40 s of Cu on cotton inactivated Escherichia coli within 30 min under visible light and within 120 min in the dark. For a longer DCMS time of 180 s, the Cu content was 0.294% w/w...

Molybdenum oxide (α-MoO)thin films were prepared on quartz and silicon substrates by thermal oxidation of Mo thin films deposited using DC magnetron sputtering method. The influence of thermal oxidation times ranging from 60-240 min on the structural and morphological properties of the preparedfilms was investigated using X-ray diffraction, Atomic force microscopy and Fourier transform infrared...

AbstractSputtered MoS2 coatings have been mostly used as a solid lubricant. In this investigation, MoSx/Ni composite coatings with Ni contents varying from 0 to 22 % were deposited onto steel substrate using a DC magnetron sputter process. The MoS2/Ni ratio in the coatings was controlled by sputtering the composite targets. The composition, microstructure, and mechanical properties of the...

Nanostructures of noble metal materials have been used in organic solar cells for enhancement of performance and light trapping. In this study, we have introduced branched silver cauliflower-like nanopatterns as sub-wavelength structured metal grating in organic solar cells. Self-assembled fabrication process of branched nanopatterns was carried out on a bio-template of cicada wing nanonipple a...