In this work, thermal based gas-phase etching of titanium nitride (TiN) is demonstrated using thionyl chloride (SOCl2) as a novel etchant. A single etchant utilised in pulsed fashion to etch TiN. This type technique may also be considered chemical or dry etching. The removed TiN amount was measured by various techniques like spectroscopic ellipsometry (SE), weighing balance and some cases X-ray...

Etching an ensemble of vacancy defects (nanopores) in single-layer graphene (SLG) to obtain a high density nanopores with effective size that enables high-performance gas sieving is challenging. This because nanopore nucleation and expansion are usually coupled. Aggressive etching conditions promote defect difficult control for limiting the pore expansion. To address this, we recently reported ...

Abstract Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications the field of microelectromechanical systems (MEMS). In addition, it most widely used surface texturing minimize reflectance light improve efficiency crystalline solar cells. wet micromachining, etch rate a major factor that affects throughput. Slower incr...

– When a corrosive solution reaches the limits of a solid sample, a chemical fracture occurs. An analytical theory for the probability of this chemical fracture is proposed and confirmed by extensive numerical experiments on a two dimensional model. This theory follows from the general probability theory of extreme events given by Gumbel. The analytic law differs from the Weibull law commonly u...

The metal-assisted chemical etching (MACE) was used to synthesis silicon nanowires. The effect of etchant concentration, etching and chemical plating time and doping density on silicon nanowires length were investigated. It is held that the increasing of HF and H2O2 concentrations lead to etching rate increment and formation of wire-like structure. The results show that, the appropriate ratio o...

This study presents the fabrication of crystalline indium tin oxide (c-ITO) patterns on glass substrate using laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO structure over a predetermined area using infrared picosecond fiber laser irradiation with a 500 kHz repetition rate, under a single lase...

Distributions of dislocations in sodium chloride crystals, which were induced by heat treatment or working, were investigated, using a newly developed etchant. The crystals, which were annealed above 3 0 0 ° C , showed reduced dislocation densities and rearranged dislocation patterns. By raising the temperature to 600 ° C or 700 ° C many elongated subboundaries or subboundaries arranged in the ...