A micro-electro-mechanical system (MEMS) is a technology that allows obtaining components between 1 to 1000 micrometers (usually 20 micrometers). Its small dimension and, at the same time, the low power consumption, has become the most important features so as to develop a new technology for nano-scale components. Moreover, the fabrication procedures are as simple as a Microstrip line procedure...

PURPOSE To evaluate the performance of micro-electromechanical systems (MEMS) switches against PIN diodes for switching a dual-tuned RF coil between 19 F and 1 H resonant frequencies for multi-nuclear lung imaging. METHODS A four-element fixed-phase and amplitude transmit-receive RF coil was constructed to provide homogeneous excitation across the lungs, and to serve as a test system for vari...

Temperature acceleration of dielectriccharging effects in state-of-the-art RF MEMS capacitive switches was characterized and modeled. From the measured charging and discharging transient currents across the switching dielectric, densities and time constants of traps in the dielectric were extracted under different temperatures. It was found that, while charging and discharging time constants ar...

The tunable characteristics of RF MEMS (Microelectromechanical Systems) components enable their integration with antennas providing numerous advantages such as reconfigurability in polarization, frequency, and radiation pattern [1]. Furthermore, the monolithic fabrication of these components with antennas can reduce parasitic effects, losses and costs. This paper presents two tunable frequency ...

This paper presents Artificial Neural Network (ANN) implementation for Mechanical modeling of Radio Frequency Micro Electro Mechanical System (RF MEMS) lateral double beam switch. We propose an efficient approach based on ANN for analyzing the static and dynamic characteristics of RF MEMS lateral switch by calculating its characteristics parameters. ANN model were trained with five learning alg...

A novel process for monolithic integration of RF MEMS switches with three-dimensional (3-D) antenna elements on a microwave laminate printed circuit board (PCB) is presented. This process calls for a low temperature (90-170C) high-density inductively coupled plasma chemical vapor deposition (HDICP CVD) technique that allows the choice of any PCB substrate, such as RO4003-FR4 (εr=3.38, tanδ=0.00...

Some applications of RF MEMS switches, such as aircraft condition monitoring and distributed satellite communication, present a unique challenge for device design and reliability. This article examines these switches when operational temperatures in the range 60°C to 100°C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools for examining device reliability...

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

In the last decade Micromechanical components for communication applications has been fabricated via IC-compatible MEMS technologies. In fact, its most important impact is not at the component level, but rather at the system level, by offering alternative transceiver architectures that reduce power consumption and enhance performance. In this paper a mixer-filter for AM frequency receiver with ...