RF MEMS is a key enabling device technology with the potential for significant performance, cost, and integration benefits to communications and radar applications. An overview of MEMS RF switches and tunable capacitors is presented, with examples of device technologies developed at RSC. Examples of MEMS-based circuits, including tunable filters and phase shifter circuits, are provided to illus...

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...

In this paper, an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of mobile terminal are presented. Such RF MEMS switches have displayed excellent RF characteristics, including lower insertion loss, higher isolation, zero power consumption, small size and weight and very low intermodulation distortion, and long battery life. It is desirable for...

This paper presents design and analysis of a novel beam for electrostatically actuated Radio Frequency Micro Electro Mechanical Systems (RF MEMS) shunt switches. In the proposed beam design, geometrical variations in terms of structure shape, material, gap, introduction of holes and changing the length and width of anchor have led to good RF performance. The holes in the beam (maximum up to 60%...

The application of Micro Electro Mechnical Switch (MEMS) technology to Electronically Scanned Arrays (ESAs) provides the potential for significantly reducing the volume, weight, cost, and power consumption of antennas for both radar and communications systems. This paper addresses the current and projected status of Radio Frequency (RF) MEMS technology and assesses the potential benefits of MEM...

A micro-electro-mechanical system (MEMS) is a technology that allows obtaining components between 1 to 1000 micrometers (usually 20 micrometers). Its small dimension and, at the same time, the low power consumption, has become the most important features so as to develop a new technology for nano-scale components. Moreover, the fabrication procedures are as simple as a Microstrip line procedure...

PURPOSE To evaluate the performance of micro-electromechanical systems (MEMS) switches against PIN diodes for switching a dual-tuned RF coil between 19 F and 1 H resonant frequencies for multi-nuclear lung imaging. METHODS A four-element fixed-phase and amplitude transmit-receive RF coil was constructed to provide homogeneous excitation across the lungs, and to serve as a test system for vari...

Temperature acceleration of dielectriccharging effects in state-of-the-art RF MEMS capacitive switches was characterized and modeled. From the measured charging and discharging transient currents across the switching dielectric, densities and time constants of traps in the dielectric were extracted under different temperatures. It was found that, while charging and discharging time constants ar...

The tunable characteristics of RF MEMS (Microelectromechanical Systems) components enable their integration with antennas providing numerous advantages such as reconfigurability in polarization, frequency, and radiation pattern [1]. Furthermore, the monolithic fabrication of these components with antennas can reduce parasitic effects, losses and costs. This paper presents two tunable frequency ...