The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to pre-fabrication verification of such layouts. In addition, problems related to density control, specific to CMOS-MEMS designs, are discussed. An automatic slotter which introduces MEMS-compatible ...

OBJECTIVES The primary objective of this pilot study was to determine if the Medication Event Monitoring System (MEMS) is capable of providing meaningful estimates of compliance within the indigenous Qatari population. The secondary objective was to highlight any specific problems which might be associated with the use of MEMS within this population. METHOD A sample of adult diabetic Qatari p...

MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly integrated picosats. Very small satellites (1 to 100 kg) stand to benefit the most from MEMS technologies. These small satellites are typically...

MEMS are regarded to be an enabling technology allowing the development of smart products by augmenting the computational ability of microelectronics with the perception and control capabilities of micro-sensors and micro-actuators. MEMS technology makes possible the integration of microelectronics with active perception and control functions, thereby, greatly expanding the design and applicati...

This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or s...

Steps and grooves, which have typical directional characteristic, are two main functional structures of MEMS (MicroElectro-Mechanical Systems). This paper proposes a method for analysis and evaluation of MEMS steps and grooves based on finite radon transform (FRAT) and lifting wavelet. The method consists of three steps. Firstly, FRAT is adopted to detect the directional characteristic of a MEM...

This paper introduces our recent activities in R&D Center of Excellence for Integrated Microsystems toward new integrated MEMS. The most prominent difference of the new integrated MEMS from conventional ones is that MEMS is fabricated on advanced LSI with a very small design rule. Two examples of integrated MEMS technologies under development are described. The first one is singlecrystal-silico...

Micro-electro-mechanical systems (MEMS) are very small devices that contain both mechanical and electrical elements with sizes in the order of microns. Design cycle time is an important consideration in the development and introduction of MEMS devices in the market. To develop extraction tools for MEMS designs, we need geometric algorithms to analyze the spatial layout of the mechanical portion...

Due to its desirable material properties, Silicon Carbide (SiC) has become an alternative material to replace Si for Microelectromechanical Systems (MEMS) applications in harsh environments. To promote SiC MEMS development towards future cost-effective products, main technology areas in material deposition and processes have attracted significant interest. The developments in these areas have c...

This paper presents the design of a V-band switched-line phase shifter using SP4T RF-MEMS switches. Sonnet simulations are used to achieve accurate circuit models of both the RF-MEMS switches as well as CPW bends within the phase shifter. The V-band phase shifter utilizes two SP4T RF-MEMS switches to perform the delay line switching. The RF performance of the SP4T MEMS switch is optimized to ad...