An anatase TiO₂ film sensor was prepared by a facile in-situ method on the interdigitated Au electrode deposited on the alumina substrate. The structure, morphology and the optical properties of the in-situ TiO₂ film sensor were characterized by X-ray diffraction, Scanning Electron Microscopy, and UV-vis diffuse reflectance spectra. The photo-assisted gas sensitivities of the prepared film towa...

Multi-walled carbon nanotube (MWCNT) film has been fabricated onto Pt-patterned alumina substrates using the chemical vapor deposition method for NH(3) gas sensing applications. The MWCNT-based sensor is sensitive to NH(3) gas at room temperature. Nanoclusters of Co catalysts have been sputtered on the surface of the MWCNT film to enhance gas sensitivity with respect to unfunctionalized CNT fil...

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au a...

The effect of SnO2 surface modification by Ag nanoclusters, synthesized by SILD method, on the operating characteristics of thin film gas sensors was studied and models for the promotional role of Ag additives were discussed. It was found that mentioned above approach can be used for improvement both the sensitivity and the rate of response of the SnO2-based gas sensors to CO and H2. At the sam...

ZnO nanorods with different sizes and shapes have been successfully synthesized via a simple hydrothermal route, using zinc acetate and Cetyltriammonium bromide (CTAB) as the reactants. The thick films of as prepared ZnO were prepared by screen-printing technique in desired pattern. The films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission elect...

Highly textured undoped (pure) and Al doped ZnO nanocrystalline thin films prepared by ultrasonic atomization and pyrolysis method are reported in this paper. ZnCl2 water solution was converted into fine mist by ultrasonic atomizer (Gapusol 9001 RBI Meylan, France). The mist was pyrolyzed on the glass substrates in horizontal quartz reactor placed in furnace. The Structural and microstructural ...

Response of highly sensitive SnO2 semiconductor carbon monoxide (CO) gas sensors based on target gas CO quasi-molecular-imprinting mechanism design is investigated with gas concentrations varied from 50 to 3000 ppm. SnO2 nanoparticles prepared via hydrothermal method and gas sensor film devices SC (exposed to the target gas CO for 12 h after the suspension coating of SnO2 film to be fully dried...

Palladium (Pd)-based hydrogen (H₂) gas sensors have been widely investigated thanks to its fast reaction and high sensitivity to hydrogen. Various sensing mechanisms have been adopted for H₂ gas sensors; however, all the sensors must be powered through an external battery. We report here an H₂ gas sensor that can detect H₂ by measuring the output voltages generated during contact electrificatio...

MoO3 thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO3 thin film is studied at gas concentration 400 ppm and working temperature of 100–400 C. It was found that th...

A monolithic CMOS microhotplate-based conductance-type gas sensor system is described. A bulk micromachining technique is used to create suspended microhotplate structures that serve as sensing film platforms. The thermal properties of the microhotplates include a 1-ms thermal time constant and a 10 C mW thermal efficiency. The polysilicon used for the microhotplate heater exhibits a temperatur...