This paper reports a new method for making multi-layer substrates (h4LS) for high aspect ratio single crystalline movable microstructures using a group of technologies, such as direct wafer bonding (DWJ3) , chemical mechanical polishing (CMP) , and reactive ion etching (RIE) . As a first example, Si-SiO,-polySi-SiO,-Si sandwich wafers were fabricated using CMP and DWB. Subsequently, free-standi...

This paper reports a new method for making high aspect ratio Single Crystalline Silicon (SCS) microstructures om multi layer substrates using Chemical Mechanical Polishing (CMP), Silicon Fusion Bonding (SFB) and Reactive Ion Etching (NE) techniques. First Si-Si02-PolySi-Si02-Si sandwich wafers were fabricated using CMP and SFB. Then microstructures were fabricated on these sandwich wafers using...

Short and intense x-ray pulses may be used for atomic-resolution diffraction imaging of single biological molecules. Radiation damage and a low signal-to-noise ratio impose stringent pulse requirements. In this Letter, we describe methods for decreasing the damage and improving the signal by encapsulating the molecule in a sacrificial layer (tamper) that reduces atomic motion and by postprocess...

Electroplated magnetic films have been integrated with silicon-based surface micromachining to fabricate magnetically actuated microflexure structures. Both the “frame-plating” technique and also a less complex onemask plating process have been used to electrodeposit NiFe onto polysilicon flexures coated with Cr-Cu seed layers. The microactuators are released by removing the underlying sacrific...

In flies, the maxillary palp possesses olfactory sensilla housing olfactory receptor neurons (ORNs), which project to the primary olfactory center, the antennal lobes (ALs). The labellum possesses gustatory sensilla housing gustatory receptor neurons (GRNs), which project to the primary gustatory center, the subesophageal ganglion (SOG). Using an anterograde staining method, we investigated the...

Ultra-thin chips (UTCs) are needed to meet the performance and packaging related requirements of flexible electronics 3D integrated circuits (ICs). However, handling UTCs (<50 μm thick), particularly after thinning, is a challenging task as excessive mechanical stresses could lead cracking. Such damages be prevented by restricting acceptable levels. Herein, we present new reliable cost-effectiv...

Dorsal cell fate in Drosophila embryos is specified by an activity gradient of Decapentaplegic (Dpp), a homologue of bone morphogenetic proteins (Bmps) 2/4. Previous genetic and biochemical studies have revealed that the Sog, Tsg and Tld proteins modify Dpp activity at the post-transcriptional level. The predominant view is that Sog and Tsg form a strong ternary complex with Dpp that prevents i...

Drought is a significant climatic disturbance in grasslands, yet the impact drought caused by global warming has on grassland phenology is still unclear. Our research investigates the long-term variability of grassland phenology in relation to drought in the Canadian prairies from 1982 to 2014. Based on the start of growing season (SOG) and the end of growing season (EOG) derived from Global In...

Transmission electron microscopy (TEM) was performed to study the microstructural evolution in Al–Cu–Fe quasicrystalline thin films. Thin films were grown by magnetron sputtering on sodium chloride crystals, which were subsequently dissolved in water to acquire free-standing films. Studies were conducted on the as-deposited sample, and samples that were annealed at 400 8C in Argon and 500 8C in...

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode ...