Oscillating microstructures are well-established and find application in many fields. These include, force sensors, e.g. AFM micro-cantilevers or accelerometers based on resonant suspended plates. This contribution presents two vibrating mechanical structures acting as force sensors in liquid media in order to measure hydrodynamic interactions. Rectangular cross section microcantilevers as well...

Acoustic waves based MEMS devices offer a promising technology platform for a wide range of applications due to their high sensitivity and the capability to operate wirelessly. These devices utilize an acoustic wave propagating through or on the surface of a piezoelectric material, as its sensing mechanism. Any variations to the characteristics of the propagation path affect the velocity or amp...

Microfabricated transducers have enabled new approaches for detection of biomolecules and cells. Integration of electronics with these tools simplify systems and provide platforms for robust use outside of the laboratory setting. Suspended microchannel resonators (SMRs) are sensitive microfluidic platforms used to precisely measure the buoyant mass of single cells and monolayers of protein in f...

The concept of “energy harvesting” is to design smart systems to capture the ambient energy and to convert it to usable electrical power for supplying small electronics devices and sensors. The goal is to develop autonomous and self-powered devices that do not need any replacement of traditional electrochemical batteries. Now piezoelectric cantilever structures are being used to harvest vibrati...

Modeling of adsorption and desorption in microelectromechanical systems (MEMS) generally is crucial for their optimization control, whether it necessary to decrease the adsorption-desorption influence (thus ensuring stable operation ultra-precise micro nanoresonators) or increase (and enhancing this manner sensitivity chemical biological resonant sensors). In work we derive use analytical mathe...

Nanoelectromechanical silicon carbide doubly-clamped beam vibrating resonators operating in the ultra-high frequency (UHF) band, with resonance frequencies of 395MHz, 411MHz, 428MHz, and 482MH, and quality factors (Q’s) of 2000~3000, have been demonstrated. The readout of electromechanical resonances from the nanodevices is integrated with a low-noise phase-locked loop to implement real-time re...

Nanomechanical resonators have an unprecedented mass sensitivity sufficient to detect single molecules, viruses or nanoparticles. The challenge with nanomechanical mass sensors is the direction of nano-sized samples onto the resonator. In this work we present an efficient inertial sampling technique and gravimetric detection of airborne nanoparticles with a nanomechanical resonant filter-fiber....

Optofluidic, lab-on-a-chip fluorescence sensors were fabricated using buried anti-resonant reflecting optical waveguides (bARROWs). The bARROWs are impervious to the negative water absorption effects that typically occur in waveguides made using hygroscopic, plasma-enhanced chemical vapor deposition (PECVD) oxides. These sensors were used to detect fluorescent microbeads and had an average sign...