The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm...

Abstract. We develop a hierarchical approach for pattern discovery in many-body stochastic systems, motivated by challenges in guiding engineering tasks for nanopattern formation in heteroepitaxial processes. Patterns in such systems have rich morphologies at mesoscales that change dramatically as control parameters vary; typically they form as a result of microscopic particle dynamics in a com...

Here we present an alternative, new, unconventional lithographic technique developed to create dense and multilevel nanostructure pattern transfer using a highly accurate polyurethane acrylate (PU, MINS101m, Minuta Tech.) mold and a polyelectrolyte multilayer as the adhesion promotion layer. Specifically, we demonstrate the pattern transfer of periodic 80 nm lines with 400 nm height and complex...

The activation of well-defined numbers of integrin molecules in predefined areas by adhesion of tissue cells to biofunctionalized micro-nanopatterned surfaces was used to determine the minimum number of activated integrins necessary to stimulate focal adhesion formation. This was realized by combining micellar and conventional e-beam lithography, which enabled deposition of 6 nm large gold nano...

This paper describes two SlipChip-based approaches to protein crystallization: a SlipChip-based free interface diffusion (FID) method and a SlipChip-based composite method that simultaneously performs microbatch and FID crystallization methods in a single device. The FID SlipChip was designed to screen multiple reagents, each at multiple diffusion equilibration times, and was validated by scree...

A one-step maskless oxygen plasma etching process is investigated to nanopattern conjugated polymer dodecylbenzenesulfonate doped polypyrrole (PPy(DBS)) and to examine the effects of nanostructures on the inherent tunable wettability of the surface and the droplet mobility. Etching characteristics such as the geometry and dimensions of the nanostructures are systematically examined for the etch...

The ability of microto nanometer-scale patterning on flexible substrates can enable many new applications in the area of photonics and organic electronics. A major roadblock has remained for many practical applications of patterned nanostructures, which is the throughput of nanopattern replication and the associated cost issues. Among the emerging techniques, nanoimprint lithography (NIL) clear...

Block copolymers have long been studied for their theories and applications especially in nanotechnology.1-5 They have periodic structures with 10-100 nm long microphase separated domains which can be controlled by the molecular weight and composition of the block copolymer. Regulating these two parameters, one can prepare thin films with different morphologies over large areas. The patterns fo...