Article history: Received 3 July 2008 Received in revised form 29 April 2009 Accepted 14 July 2009 Available online 26 July 2009

MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various MEMS components and technologies. MEMS devices fabricated using bulk and surface micromachining process technologies are emphasized.

Selected Publications 1. Yan Yu, Jinping Ou, et.al. Development of wireless MEMS inclination sensor system for swing monitoring of large scale hook structures. Design of a real-time overload monitoring system for bridges and roads based on structural response, Measurement, 2013, 46(1), 345-352.

In many cases, modeling and simulation of multi-physics systems cannot be carried out with one simulator or one class of models. Typically, for complex heterogeneous systems a combination of different modeling approaches, sometimes combined with simulator coupling, is the most appropriate method. A tool-box containing different modeling tools and software for simulator coupling is presented whi...

This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanation...

A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-in voltages and resonance frequency, is described. Using this combination of measurements, one can estimate process-induced variations in the device layout dimensions as well as deviations from nominal value in material properties, which can be used either for testing or device...

Canadian oil sands are unconsolidated sand deposits that are impregnated with heavy, viscous petroleum, normally referred to as bitumen. The total bitumen in place in Alberta is estimated at 1.7 to 2.5 trillion barrels and is clearly massive by world standards. Presently, 25% of the Canadian energy needs are derived from upgraded bitumen from mined oil sands. The oil sands are a complex mixture...