نتایج جستجو برای: micro electromechanical systems
تعداد نتایج: 1288232 فیلتر نتایج به سال:
There is no literature mentioning the electromechanical behavior of micro structures driven by traveling electrostatic forces. This article is thus the first to present the dynamics and stabilities of a micro-ring subjected to a traveling electrostatic force. The traveling electrostatic force may be induced by sequentially actuated electrodes which are arranged around the flexible micro-ring. T...
In this work the design, fabrication and testing of the first 3D-printed and wet metallized capacitive z-axis accelerometer with a volume of 3.4 cm × 8 mm × 2.5 mm is presented. Preliminary results well match the modelling, both in terms of electromechanical parameters and of measured sensitivity, thus validating the proposed concept and fabrication process. With a spring thickness of 300 μm an...
Results on design, fabrication and testing of silicon micromachined magnetic actuators are presented. Magnetic actuators are capable of providing large force (on the order of mN) and large displacement (micrometer to millimeter range) within micro electromechanical devices and systems. Electroplated Permalloy (Ni80Fe20) material is the media for magnetic interaction and force generation. The Pe...
In this work, we designed a micro-electromechanical systems (MEMS) device that allows simultaneous direct measurement of mechanical properties during deformation under external stress and characterization of the evolution of nanomaterial microstructure within a transmission electron microscope. This MEMS device makes it easy to establish the correlation between microstructure and mechanical pro...
In order to understand the loss mechanism of mechanical oscillators in micro-electromechanical systems, we have studied the temperature dependence of the quality factor Q of a high Q silicon mechanical oscillator from 0.4 K to 300 K. At temperatures above 70 K, the energy loss is principally caused by thermoelastic effect in the flexural components of the modes. Below 50 K, we find the improvem...
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