In this paper a sensor fusion algorithm is developed and implemented for detecting orientation in three dimensions. Tri-axis MEMS inertial sensors and tri-axis magnetometer outputs are used as input of fusion system. A Kalman filter is designed to compensate the inertial sensors errors by combining accelerometer and gyroscope data. A tilt compensation unit is designed to calculate the heading o...

This paper describes the structural and thermal modeling of a Micro Electro Mechanical System (MEMS) z-axis angular gyroscope. The gyroscope consists of a oscillating proof mass supported by a suspension made up of six concentric interconnected rings rigidly attached to an anchored frame. The device is capable of measuring angular displacement through precession of the proof mass line of oscill...

MEMS gyroscopes are used to detect rotation rates and have enabled a variety of motionbased technologies in a range of industries. They are composed of micro-machined polysilicon structures that resonate and deflect when a rotation is experienced. The topic of this thesis surrounds a system architecture to optimize the performance of a gyroscope. The MEMS gyroscope contains a resonator and an a...

This paper presents an adaptive control algorithm for realizing a vibratory angle measuring gyroscope so that rotation angle can be directly measured without integration of angular rate, thus eliminating the accumulation of numerical integration errors. The proposed control algorithm uses a trajectory following approach and the reference trajectory is generated by an ideal angle measuring gyros...

Dynamics and control of a MEMS angle measuring gyroscope Sungsu Park a,∗, Roberto Horowitz b, Chin-Woo Tan c a Department of Aerospace Engineering, Sejong University, 98 Gunja-dong, Kwangjin-gu, Seoul, Republic of Korea b Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720, United States c PATH, University of California at Berkeley, Richmond, CA 94804,...

Motion sensors such as MEMS gyroscopes and accelerometers are characterized by a small size, light weight, high sensitivity, and low cost. They are used in an increasing number of applications. However, they are easily influenced by environmental effects such as temperature change, shock, and vibration. Thus, signal processing is essential for minimizing errors and improving signal quality and ...

This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures...

Accurate measurements of the Earth’s rotation rate can be obtained by using high quality gyroscopes, such as ring laser gyros (RLG) included in tactical grade inertial measurement units. However, such devices are bulky and expensive. As the Micro-Electro-Mechanical System (MEMS) technology has evolved rapidly during the last years, accurate low-cost gyroscopes are now available. Are the new MEM...

This article presents a software tool to automatically generate the mathematical model of capacitive MEMS gyroscopes in a symbolic form. After describing the operational principle of a specific one-axis gyroscope with capacitive drive actuators and capacitive sensors, a mathematical concept is presented that allows for the systematic description of a certain class of capacitive MEMS gyroscopes....