The NanoSIMS ion probe is a new-generation SIMS instrument, characterised by superior spatial resolution, high sensitivity and multi-collection capability. Isotope studies of certain elements can be conducted with 50–100 nm resolution, making the NanoSIMS an indispensable tool in many research fields. We review technical aspects of the NanoSIMS ion probe and present examples of applications in ...

Electrostatic probe measurements for low-pressure inductively coupled SF(6) plasmas are performed. From the current-voltage (I-V) curves of probe, the saturation currents of the positive ions and electrons and the electron temperature are measured. The electronegativity and the negative ion density are deduced by using the ratios of these parameters at three adjacent pressure points. The positi...

A testing platform is designed to study ion beam neutralization in the mesothermal, collisionless region. In the experimental setup, argon neutrals were ionized in a microwave cavity and accelerated by a plasma lens system which was biased to 2500 V above the system ground. Electrons were boiled off from two hot tungsten filaments to neutralize the ion beam. The plasma is diagnosed using Langmu...