Many production steps used in the manufacturing of integrated circuits involve the deposition of material from the gas phase onto wafers. Models for these processes should account for gaseous transport in a range of flow regimes, from continuum flow to free molecular or Knudsen flow, and for chemical reactions at the wafer surface. We develop a kinetic transport and reaction model whose mathema...

We present a scalable iterative solver for high-order hybridized discontinuous Galerkin (HDG) discretizations of linear partial differential equations. It is an interplay between domain decomposition methods and HDG discretizations, and hence inheriting advances from both sides. In particular, the method can be viewed as a Gauss-Seidel approach that requires only independent element-by-element ...

The finite-strip method (FSM) is a hybrid technique which combines spectral and finite-element methods. Finite-element approximations are made for each mode of a finite Fourier series expansion. The Galerkin formulated method is set apart from other weighted-residual techniques by the selection of two types of basis functions, a piecewise linear interpolating function and a trigonometric functi...

In this paper, a central discontinuous Galerkin method is proposed to solve for the viscosity solutions of Hamilton-Jacobi equations. Central discontinuous Galerkin methods were originally introduced for hyperbolic conservation laws. They combine the central scheme and the discontinuous Galerkin method and therefore carry many features of both methods. Since Hamilton-Jacobi equations in general...

Abstract. The present paper introduces bilinear forms that are equivalent to the recovery-based discontinuous Galerkin formulation introduced by Van Leer in 2005. The recovery method approximates the solution of the diffusion equation in a discontinuous function space, while inter-element coupling is achieved by a local L2 projection that recovers a smooth continuous function underlying the dis...

There are few techniques available to numerically solve sixth-order boundary-value problems with two-point boundary conditions. In this paper we show that the Sinc-Galerkin method is a very effective tool in numerically solving such problems. The method is then tested on examples with homogeneous and nonhomogeneous boundary conditions and a comparison with the modified decomposition method is m...

Computational simulation of steam flow and heat transfer in power plant condensers on the basis of the threedimensional mathematical model for the flow through porous media is presented. In order to solve the mathematical model of steam flow and heat transfer in power plant condensers, the Streamline Upwind Petrov-Galerkin finite element method is applied. By comparison of the results of simula...

a truly meshless local petrov-galerkin (mlpg) method is developed for solving 3d elasto-static problems. using the general mlpg concept, this method is derived through the local weak forms of the equilibrium equations, by using test functions, namely, the heaviside function. the moving least squares (mls) are chosen to construct the shape functions, for the mlpg method. the penalty approximatio...