This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures. Process flows include wet bulk etching and wafer bonding, surface micromachining, deep trench silicon micromachining, CMOS MEMS, and micromolding.

With the development of Internet computing and software agent technologies, agentbased e-commerce is emerging. How to create agents for e-commerce applications has become an important issue along the way to success. We propose a factory-based approach to support agent fabrication in e-commerce and elaborate a design based on the SAFER (Secure Agent Fabrication, Evolution & Roaming) framework. T...

Future astrophysical missions will require fabrication technology capable of producing high angular resolution x-ray optics. A full-shell direct fabrication approach using modern robotic polishing machines has the potential for producing high resolution, light-weight and affordable x-ray mirrors that can be nested to produce large collecting area. This approach to mirror fabrication, based on t...

ooperative fabrication was a key factor in building the Near Earth Asteroid Rendezvous (NEAR) spacecraft within the cost and schedule constraints dictated by the NASA Discovery Program. Because many of the traditional barriers between the engineering and the fabrication teams were avoided on NEAR, APL reaped the benefits of cooperative planning, design for ease of fabrication and assembly, and ...

A method for fabrication of three-dimensional (3D) silicon nanostructures based on selective formation of porous silicon using ion beam irradiation of bulk p-type silicon followed by electrochemical etching is shown. It opens a route towards the fabrication of two-dimensional (2D) and 3D silicon-based photonic crystals with high flexibility and industrial compatibility. In this work, we present...

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...

We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional micromachining. The main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. The quality (Q) factor ...

In this paper, a novel way for the fabrication of opto-electronic transceiver modules is proposed. These modules are characterized by the use of MT-RJ connectors, low-cost fabrication tools, highly efficient opto-electronic components such as VCSELs and CMOS integrated detectors, and an easy fabrication scheme. The module is based on the direct alignment technique; this means that the fibre and...

19 Figure 11: Computer model of an f16 (left) and assembled out of heavy paper (right). 150 Table 1: Diierent models layout construction times. piecewise developable surfaces. However, the introduced approach allows one to construct a piecewise developable surface approximation to an arbitrary freefrom surface, with tolerance control. Throughout this paper, it was implicitly assumed that the ma...