نتایج جستجو برای: electron beam deposition

تعداد نتایج: 482258  

2018
Luisa Berger Katarzyna Madajska Iwona B Szymanska Katja Höflich Mikhail N Polyakov Jakub Jurczyk Carlos Guerra-Nuñez Ivo Utke

Focused electron beam induced deposition (FEBID) is a flexible direct-write method to obtain defined structures with a high lateral resolution. In order to use this technique in application fields such as plasmonics, suitable precursors which allow the deposition of desired materials have to be identified. Well known for its plasmonic properties, silver represents an interesting candidate for F...

2008
Hiroyuki Oguchi

Title of Dissertation: Combinatorial Investigation of Intermetallics Using Electron-beam Deposition Hiroyuki Oguchi, Doctor of Philosophy, 2008 Directed By: Professor Ichiro Takeuchi, Materials Science & Engineering We have systematically studied subtle changes in physical properties of intermetallics using the combinatorial strategy where a large number of samples with systematically changed p...

2003

1 Thin film specifications continue to push the envelope of manufacturing capabilities. Many advanced commercial and military applications require ultra low loss films that are extremely difficult to deposit using conventional Electron beam or Ion Assisted Deposition (IAD) technology. Ring Laser Gyroscope (RLG) mirrors for instance require high packing density, minimal defects, and negligible a...

Journal: :Ultramicroscopy 2005
Kristian Mølhave Dorte Nørgaard Madsen Peter Bøggild

A large number of applications of electron-beam lithography (EBL) systems in nanotechnology have been demonstrated in recent years. In this paper we present a simple and general-purpose EBL system constructed by insertion of an electrostatic deflector plate system at the electron-beam exit of the column of a scanning electron microscope (SEM). The system can easily be mounted on most standard S...

Journal: :Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2016

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