We discuss the co-design of integrated MEMS accelerometer array designed and fabricated onto the input of a CMOS charge amplifier. The focus of this paper is on two parts of the design flow: Firstly, advanced 3D process emulation and secondly, circuit simulation. We use a "voxel" (volumetric pixel) based process emulation tool that takes 2D masks and a description of the fabrication process, to...

− Accurate measurements of MEMS surfaces, geometries and motions are crucial to achieving the desired performance of the devices. The wide variety of MEMS devices in development and production requires very flexible metrology for single-platform characterization. In addition to having greatly varying geometries, devices must also be characterized statically and under actuation. White-light inte...

This research aims at enhancing the accuracy of land vehicular navigation systems by integrating GPS and Micro-Electro-Mechanical-System (MEMS) based inertial measurement units (IMU). This comprises improving the MEMS-based inertial output signals as well as investigating the limitations of a conventional Kalman Filtering (KF) solution for MEMS-IMU/GPS integration. These limitations are due to ...

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity and reliability in detail. It is necessary to understand the effects of electrostatic forces in ...

Commercial CAD tools for MEMS have significantly contributed to the growth that the MEMS industry has experienced over the past two years by reducing development cycles and enabling the more rapid release of mature MEMS products. Unfortunately, the CAD for MEMS industry has focused primarily on device performance (for example, mechanical response due to electrostatic loading), with a concentrat...

AIM We tested the hypothesis that administrations of methanolic extracts of Musa sapientum sucker (MEMS) with exercises attenuated hyperglycemia in alloxan-diabetic rats. MATERIALS AND METHODS A total of 40 adult male rats were divided into equal eight groups. Normoglycemic Group A was Control. Alloxan (180 mg/kg, i.p.) was administered to rats in Groups B - H to induce diabetes. Group B (dia...

Most MEMS devices are currently based on silicon because of the available surface machining technology. However, Si has poor mechanical and tribological properties which makes it difficult to produce high performance Si based MEMS devices that could work reliably, particularly in harsh environments; diamond, as a superhard material with high mechanical strength, exceptional chemical inertness, ...

Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.

In this study, we describe the operation of piezoelectric energy converters and electromechanical modeling harvesting (PEH) devices based on microelectromechanical systems (MEMS) for low-power sensors. Consideration is given to a harvester standard MEMS. The parameters are determined optimized using simple MEMS cantilever model. On top Brass substrate, model uses single layer material. We utili...