Micromechanical (or “μmechanical”) components for communication applications fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to not only miniaturize and lower the parts counts of wireless front-ends via higher levels of integration, but also to eventually raise robustness (against interf...

ion Scale Properties Nano CMOS 30-100nm Capacitance in CMOS RF MEMS 100-500nm Properties of antenna CNT 10-30 nm Conductance Although these tools have been successful in simulating the behavior of simple-function devices but fails when it goes to more complex areas because the physics developed cannot explain accurately all the properties, also they have not been as successful in simulating the...

This paper discusses an approach for continuous and low-power sensing of infrequent, high consequence events. The envisioned sub-10 nW power consumption architecture includes an RF detector, an array of MEMS resonators, and an IC detector. This paper focuses on the MEMS resonator array. We show that MEMS resonators with the Quality factor on the order of 1M can solve the challenging problem of ...

Presents information on the MMTS RF MEMS and Microwave Acoustics Committee.

In this work, several reconfigurable antennas are presented and discussed. The antennas to be presented cover a wide range of designs such as fractal antennas, triangular antennas, dipoles and monopoles with variable sleeves. All these antennas make use of MEMS switches, to make them reconfigurable. Some of the challenges that the designer has to face in biasing and integrating these switches w...

RF MEMS is a key enabling device technology with the potential for significant performance, cost, and integration benefits to communications and radar applications. An overview of MEMS RF switches and tunable capacitors is presented, with examples of device technologies developed at RSC. Examples of MEMS-based circuits, including tunable filters and phase shifter circuits, are provided to illus...

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...

In this paper, an introduction and overview of MEMS technology with a focus on RF applications of MEMS in the design of mobile terminal are presented. Such RF MEMS switches have displayed excellent RF characteristics, including lower insertion loss, higher isolation, zero power consumption, small size and weight and very low intermodulation distortion, and long battery life. It is desirable for...

This paper presents design and analysis of a novel beam for electrostatically actuated Radio Frequency Micro Electro Mechanical Systems (RF MEMS) shunt switches. In the proposed beam design, geometrical variations in terms of structure shape, material, gap, introduction of holes and changing the length and width of anchor have led to good RF performance. The holes in the beam (maximum up to 60%...

The application of Micro Electro Mechnical Switch (MEMS) technology to Electronically Scanned Arrays (ESAs) provides the potential for significantly reducing the volume, weight, cost, and power consumption of antennas for both radar and communications systems. This paper addresses the current and projected status of Radio Frequency (RF) MEMS technology and assesses the potential benefits of MEM...