The design of sensors and RF components has increasingly made use of microelectromechanical systems (MEMS) technology or micromachining. The quality-factor of inductors on silicon and the reduction of substrate losses requires approaches as the use of MEMS technology. The MEMS technology had emerged from the conventional silicon processes with the aim to utilize the well-established microstruct...

Initial results have been achieved for automatic synthesis of MEMS system-level lumped parameter models using genetic programming and bond graphs. This paper first discusses the necessity of narrowing the problem of MEMS synthesis into a certain specific application domain, e.g., RF MEM devices. Then the paper briefly introduces the flow of a structured MEMS design process and points out that s...

Micromechanical (or “μmechanical”) components for communication applications fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to not only miniaturize and lower the parts counts of wireless front-ends via higher levels of integration, but also to eventually raise robustness (against interf...

ion Scale Properties Nano CMOS 30-100nm Capacitance in CMOS RF MEMS 100-500nm Properties of antenna CNT 10-30 nm Conductance Although these tools have been successful in simulating the behavior of simple-function devices but fails when it goes to more complex areas because the physics developed cannot explain accurately all the properties, also they have not been as successful in simulating the...

This paper discusses an approach for continuous and low-power sensing of infrequent, high consequence events. The envisioned sub-10 nW power consumption architecture includes an RF detector, an array of MEMS resonators, and an IC detector. This paper focuses on the MEMS resonator array. We show that MEMS resonators with the Quality factor on the order of 1M can solve the challenging problem of ...

Presents information on the MMTS RF MEMS and Microwave Acoustics Committee.

In this work, several reconfigurable antennas are presented and discussed. The antennas to be presented cover a wide range of designs such as fractal antennas, triangular antennas, dipoles and monopoles with variable sleeves. All these antennas make use of MEMS switches, to make them reconfigurable. Some of the challenges that the designer has to face in biasing and integrating these switches w...