Buranuddin Yeop Majlis

[ 1 ] - Fabrication and Characterization of a New MEMS Capacitive Microphone using Perforated Diaphragm

In this paper, a novel single-chip MEMS capacitive microphone is presented. The novelties of this method relies on the moveable aluminum (Al) diaphragm positioned over the backplate electrode, where the diaphragm includes a plurality of holes to allow the air in the gap between the electrode and diaphragm to escape and thus reduce acoustical damping in the microphone. Spin-on-glass (SOG) was us...