Aghil Mosavi

[ 1 ] - Accurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...